Mikami O | Department Of Electronic Engineering College Of Engineering Chubu University
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概要
Department Of Electronic Engineering College Of Engineering Chubu University | 論文
- Verification of Sheath Potential of Processing Plasma in an Electron-Beam-Excited Plasma Apparatus Using a Current Balance Equation
- Sheath Potential in the Accelerating Region of an Electron-Beam-Excited Plasma Apparatus
- Production of High-Density Plasmas in Electron-Beam-Excited Plasma Device ( Plasma Processing)
- Sheath Potential in Electron-Beam-Excited Plasma
- Control of Cl2 Plasma by Electron-Beam-Excited Plasma and Poly-Si Etching