Stehle J | Sopra
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概要
Sopra | 論文
- ED2000-84 / SDM2000-84 Characterization of semiconductor structures in the VUV wavelength range using spectroscopic ellipsometry and spectroscopic photometry.
- ED2000-84 / SDM2000-84 Characterization of semiconductor structures in the VUV wavelength range using spectroscopic ellipsometry and spectroscopic photometry.
- 7.4 : High-Energy-Excimer-Laser System for AMLCD : Stability and Uniformity for High Performance TFT(Report on IDMC2000)
- 14-6 200ns-Excimer-Laser Pulse : a Way Toward Optimization of the Crystallization of Amorphous Silicon for Flat Panel Display Applications(4.Session 14:AMLCD 2)
- 9.5 Improvement of p-Si film quality and p-Si TFT characteristics by Application of Large-Area ELA Technology(1.Active-Matrix Technologies I, II)(20th IDRC report)