YAMAGATA Michihiro | AVC Products Development Laboratory, Matsushita Electric Industrial Co., Ltd.
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概要
AVC Products Development Laboratory, Matsushita Electric Industrial Co., Ltd. | 論文
- Development of Evaluation Method of Gas Viscous Friction Force Acting on Head/Disk Interface (Special Issue on Information Storage Technologies for the 21st Century)
- New Technologies of KrF Excimer Laser Lithography System in 0.25 Micron Complex Circuit Patterns (Special Issue on Quarter Micron Si Device and Process Technologies)
- A New Analytical Technique for Evaluating Standing Wave Effect of Chemically Amplified Positive Resist
- Lens Design for Optical Head Compatible with Compact Disk and Digital Versatile Disk