Ohmori Katsumi | Tokyo Ohka Kogyo Co. Ltd.
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概要
Tokyo Ohka Kogyo Co. Ltd. | 論文
- X-ray Reflectivity Study on Depth Profile of Acid Generator Distribution in Chemically Amplified Resists
- Crystalline Properties of Laser Crystallized Silicon Films
- Enhancement of Acid Production in Chemically Amplified Resist for Extreme Ultraviolet Lithography
- Proton Dynamics in Chemically Amplified Electron Beam Resists
- Potential Cause of Inhomogeneous Acid Distribution in Chemically Amplified Resists for Post Optical Lithography