Garg A | Ibm Almaden Res. Center Ca Usa

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• 同名の論文著者
• Ibm Almaden Res. Center Ca Usaの論文著者

Ibm Almaden Res. Center Ca Usa | 論文

• Solid-Phase Reactions of Diffusion Barriers of Ti and TiN to Copper Layers on SiO_2
• Cyclic Olefin Resist Polymers and Polymerizations for Improved Etch Resistance
• Investigation of Deep UV Resists by NMR:Residual Casting Solvents,Chemistries,and PAG Decomposition in Film
• Novel Fluoropolymers for Use in 157nm Lithography
• Silicon Chemistry for Bilayer Resist Systems

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