Chang Kow-Ming | Department of Electronics Engineering and Institute of Electronics, National Chiao-Tung University, Hsin-Chu, Taiwan, Republic of China

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• Chang Kow-Mingの詳細を見る
• 同名の論文著者
• Department of Electronics Engineering and Institute of Electronics, National Chiao-Tung University, Hsin-Chu, Taiwan, Republic of Chinaの論文著者

Department of Electronics Engineering and Institute of Electronics, National Chiao-Tung University, Hsin-Chu, Taiwan, Republic of China | 論文

• Robust Ultrathin Oxynitride with High Nitrogen Diffusion Barrier near its Surface Formed by NH3 Nitridation of Chemical Oxide and Reoxidation with O2

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