Nakashima Akira | Catalysts and Chemicals Industry Co. Ltd., Fine Chemicals Research Center, 13-2 Kitaminato, Wakamatsu, Kitakyushu 808-0027, Japan

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Catalysts and Chemicals Industry Co. Ltd., Fine Chemicals Research Center, 13-2 Kitaminato, Wakamatsu, Kitakyushu 808-0027, Japan | 論文

• Dehydration after Plasma Oxidation of Porous Low-Dielectric-Constant Spin-on-Glass Films

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