Okigawa Mitsuru | Association of Super-Advanced Electronics Technologies (ASET), 292 Yoshida-cho, Totsuka-ku, Yokohama 244-0817, Japan

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• Association of Super-Advanced Electronics Technologies (ASET), 292 Yoshida-cho, Totsuka-ku, Yokohama 244-0817, Japanの論文著者

Association of Super-Advanced Electronics Technologies (ASET), 292 Yoshida-cho, Totsuka-ku, Yokohama 244-0817, Japan | 論文

• Low Dielectric Constant Film Containing No Oxygen for Barrier-Free Cu Interconnects

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