Watanabe Hisashi | Kyoto Research Laboratory, Matsushita Electronics Co.
スポンサーリンク
概要
Kyoto Research Laboratory, Matsushita Electronics Co. | 論文
- Suppression of Resistance Increase in Al/W Interconnects by N_2 Plasma Treatment
- Suppression of Resistance Increase in Annealed Al/W Interconnects by Capacitively Coupled Plasma Nitridation on W Surface