Ogata Toshiyuki | TOKYO OHKA KOGYO CO., LTD.

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• 同名の論文著者
• TOKYO OHKA KOGYO CO., LTD.の論文著者

TOKYO OHKA KOGYO CO., LTD. | 論文

• Low-E_a Chemical Amplification Resists for 193nm Lithography
• X-ray Reflectivity Study on Depth Profile of Acid Generator Distribution in Chemically Amplified Resists
• Enhancement of Acid Production in Chemically Amplified Resist for Extreme Ultraviolet Lithography
• Reactivity of Halogenated Resist Polymer with Low-Energy Electrons
• Proton Dynamics in Chemically Amplified Electron Beam Resists

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