Ogawa Hiroki | Department of Material Science, School of Engineering, University of Tokyo

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• 同名の論文著者
• Department of Material Science, School of Engineering, University of Tokyoの論文著者

Department of Material Science, School of Engineering, University of Tokyo | 論文

• Mechanism of Cloudy Surface Generation on Si Wafer Employing Numerically Controlled Local Dry Etching (NC-LDE)
• Numerically Controlled Dry Etching Technology for Flattening of Si Wafer which Employs SF_6/H_2 Downstream Plasma

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