Kusaba Kouta | Department of Electronics, Tokai University, 1117 Kitakaname, Hiratsuka 259-1292, Japan
スポンサーリンク
概要
- Kusaba Koutaの詳細を見る
- 同名の論文著者
- Department of Electronics, Tokai University, 1117 Kitakaname, Hiratsuka 259-1292, Japanの論文著者
Department of Electronics, Tokai University, 1117 Kitakaname, Hiratsuka 259-1292, Japan | 論文
- In Situ Measurements of Etching Species in SF6 Microwave Downstream Plasma by Ion Attachment Mass Spectroscopy
- Warming Potential Reduction of C4F8 Using Inductively Coupled Plasma