Kai Toshiyuki | JSR Corp., 100 Kawajiri-cho, Yokkaichi, Mie 510-8552, Japan

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• JSR Corp., 100 Kawajiri-cho, Yokkaichi, Mie 510-8552, Japanの論文著者

JSR Corp., 100 Kawajiri-cho, Yokkaichi, Mie 510-8552, Japan | 論文

• Difference between Acid Generation Mechanisms in Poly(hydroxystyrene)- and Polyacrylate-Based Chemically Amplified Resists upon Exposure to Extreme Ultraviolet Radiation
• Relationship between Acid Generator Concentration and Acid Yield in Chemically Amplified Electron Beam Resist

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