Katagiri Tomoharu | LSI Research Center, Technical Research Division, Kawasaki Steel Corp.
スポンサーリンク
概要
LSI Research Center, Technical Research Division, Kawasaki Steel Corp. | 論文
- Metalorganic Chemical Vapor Deposition of Aluminum-Copper Alloy Films
- Improvement of Gap-Filling Property of O_3-tetraethylorthosilicate (TEOS) Film by Ethanol Surface Treatment
- Relationship between Water Diffusivity of Dielectric Films and Accelerated Hot Carrier Degradation Caused by Water
- Water Diffusivity of Dielectric Films Evaluated with Use of D_2O
- Reflection High-Energy Electron Diffraction Observation of Anti-Phase Domain Ordering of the 2×1 Reconstructed (111) Surface of Chemical-Vapor-Deposited Diamond