Toyoda Noriaki | Laboratory of Advanced Science & Technology for Industry, University of Hyogo
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概要
Laboratory of Advanced Science & Technology for Industry, University of Hyogo | 論文
- Fabrication of Microcoils Using X-ray Lithography and Metallizaiton
- Fabrication of Spiral Micro Coil Lines for Electromagnetic Actuators
- Surface Modification and Direct Bonding of Different Materials Irradiated H2O Ion
- Fabrication of a Micro Capacitive Inclination Sensor by Resin Molding
- Fabrication of Microcoils with Narrow and High Aspect Ratio Coil Line