Ushida Yasuhisa | Optoelectronics Division, Toyoda Gosei Co., Ltd.
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概要
Optoelectronics Division, Toyoda Gosei Co., Ltd. | 論文
- Grain Growth Mechanism of Cu Thin Films
- The Effect of Target Purities on Grain Growth in Sputtered Copper Thin Films
- The Effect of Strain Distribution on Abnormal Grain Growth in Cu Thin Films