Park Young | School of Advanced Materials Science and Engineering and Center for Advanced Plasma Surface Technology, Sungkyunkwan University, Suwon, Kyunggi-do 440-746, Korea
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- School of Advanced Materials Science and Engineering and Center for Advanced Plasma Surface Technology, Sungkyunkwan University, Suwon, Kyunggi-do 440-746, Koreaの論文著者
School of Advanced Materials Science and Engineering and Center for Advanced Plasma Surface Technology, Sungkyunkwan University, Suwon, Kyunggi-do 440-746, Korea | 論文
- Light Output Power Enhancement of GaN-Based Light Emitting Diodes with Periodic Deflector Embedded on the Wet Etch Patterned Sapphire Substrate
- Inductively Coupled Plasma Etching of Chemical-Vapor-Deposited Amorphous Carbon in N2/O2/Ar Chemistries
- Improvement of the Size-Selective Separation of Microbeads in a Curved Microchannel Using Particle Focusing
- Etching Characteristics of ZnO and Al-Doped ZnO in Inductively Coupled Cl2/CH4/H2/Ar and BCl3/CH4/H2/Ar Plasmas
- Effect of O2 Gas during Inductively Coupled O2/Cl2 Plasma Etching of Mo and HfO2 for Gate Stack Patterning