Takahashi Masashi | Department of Electrical and Electronic Engineering, Faculty of Engineering, Shinshu University, 4-17-1 Wakasato, Nagano-shi, Nagano 380-8553, Japan

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• Department of Electrical and Electronic Engineering, Faculty of Engineering, Shinshu University, 4-17-1 Wakasato, Nagano-shi, Nagano 380-8553, Japanの論文著者

Department of Electrical and Electronic Engineering, Faculty of Engineering, Shinshu University, 4-17-1 Wakasato, Nagano-shi, Nagano 380-8553, Japan | 論文

• Electrical Properties of 1-μm-Thick Continuous $\beta$-FeSi2 Films on Abraded Si-Substrates Grown by RF-Magnetron Sputtering

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