Yamamoto Tsuyoshi | NTT Microsystem Integration Laboratories, Nippon Telegraph and Telephone Corporation, 3-1 Morinosato Wakamiya, Atsugi-shi, Kanagawa 243-0198, Japan

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• NTT Microsystem Integration Laboratories, Nippon Telegraph and Telephone Corporation, 3-1 Morinosato Wakamiya, Atsugi-shi, Kanagawa 243-0198, Japanの論文著者

NTT Microsystem Integration Laboratories, Nippon Telegraph and Telephone Corporation, 3-1 Morinosato Wakamiya, Atsugi-shi, Kanagawa 243-0198, Japan | 論文

• A Three-Dimensional Micro-Electro-Mechanical System (MEMS) Optical Switch Module Using Low-Cost Highly Accurate Polymer Components

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