Yamada Takayuki | ULSI Process Technology Development Center, Matsushita Electronics Corporation, 19 Nishikujyo-Kasugacho, Minami-ku, Kyoto 601-8413, Japan

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• ULSI Process Technology Development Center, Matsushita Electronics Corporation, 19 Nishikujyo-Kasugacho, Minami-ku, Kyoto 601-8413, Japanの論文著者

ULSI Process Technology Development Center, Matsushita Electronics Corporation, 19 Nishikujyo-Kasugacho, Minami-ku, Kyoto 601-8413, Japan | 論文

• Influences of Residual Chlorine in CVD-TiN Gate Electrode on the Gate Oxide Reliability in Multiple-Thickness Oxide Technology

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