OTA Kazuya | 論文著者

ASET EUV Laboratory, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan

Aset Euvl Laboratory

ASET EUVL Laboratory, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan

Department Of Electro Photo Optics Fasculty Of Engineering Tokai University

Department of Electro Photo Optics, Fasculty of Engineering, Tokai University

Euv Metrology Technology Research Department Association Of Super-advanced Electronics Technologies

EUV Metrology Technology Research Department, Association of Super-Advanced Electronics Technologies (ASET), 10-1, Asamizodai 1-chome, Sagamihara, Kanagawa 228-0828, Japan

Graduate School Of Engineering Science Osaka University

Graduate School of Engineering Science, Osaka University

Japan Expert Clone Corporation

MIRAI-Semiconductor Leading Edge Technologies, Inc., Tsukuba, Ibaraki 305-8569, Japan

System Designing Section Designing Department Industrial Supplies & Equipment Division Nikon Cor

Trimatiz Limited