MIYANO Takaya | 論文著者

Advanced Technology Research Laboratories Sumitomo Metal Industries Ltd.

Advanced Technology Research Laboratories, Sumitomo Metal Industries, Ltd.

Center For Promotion Of The Coe Program Ritsumeikan University

Center for Promotion of the COE Program, Ritsumeikan University

Department of Mechanical Engineering, Ritsumeikan University

Department Of Micro System Technology Ritsumeikan University

Department of Micro System Technology, Ritsumeikan University

Device Technology Section Advanced Technology Lab. Sumitomo Metal Industries Ltd.

Device Technology Section, Advanced Technology Lab., Sumitomo Metal Industries, Ltd.

Ritsumeikan Univ. Kusatsu‐shi Jpn

Ritsumeikan University