KATO HIROKAZU | 論文著者

Nagoya University Graduate School of Environmental Studies

Nagoya University, Graduate School of Environmental Studies

Nara Institute of Science and Technology

National Institute of Advanced Industrial Science and Technology (AIST)

Process & Manufacturing Engineering Center, Semiconductor Company, Toshiba Corporation, 8 Shinsugita-cho, Isogo-ku, Yokohama 235-8522, Japan

Process & Manufacturing Engineering Center, Toshiba Corporation Semiconductor Company,

Process & Manufacturing Engineering Center, Toshiba Corporation Semiconductor Company, Yokohama 235-8522, Japan

Space Utilization Research Center, National Space Development Agency of Japan

Specialty Materials Research Laboratories, Nissan Chemical Industries, Ltd.

The First Department of Internal Medicine, The University of Tokyo

Toshiba Corporation