Goto Kinya | 論文著者

Laboratory for Microelectronics, Research Institute of Electrical Communication, Tohoku University

Laboratory for Microelectronics, Research Institute of Electrical Communication, Tohoku University, 2–1–1 Katahira, Aoba–ku, Sendai 980

Thinfilm and Wet/Diffusion Engineering Department, Renesas Electronics Corporation, Hitachinaka, Ibaraki 312-8504, Japan

Wafer Process Engineering Development Division Renesas Technology Corporation

Wafer Process Engineering Development Division, Renesas Technology Corporation

Wafer Process Engineering Development Division, Renesas Technology Corporation, 4-1 Mizuhara, Itami, Hyogo 664-0005, Japan