Radio Frequency Characteristics of Printed Meander Inductors and Interdigital Capacitors
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概要
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Radio frequency (RF) characterizations of printed silver ink inductors manufactured at low (150 °C) and high (850 °C) temperatures and interdigital capacitors manufactured at high (850 °C) temperatures were carried out in the 500 MHz to 6 GHz range. The S-parameter responses of the components were measured with a probe station and an Agilent 8510C network analyzer. Electrical parameters such as inductance, capacitance, and a quality factor were estimated from experimental results and numerical calculation. Component parameters are dependent on physical dimensions and material properties. The components were created in a 4 \times 4 mm<sup>2</sup>area with line widths/gaps of 500/500, 250/250, and 200/200 μm. Windings in the coils varied from 2 to 5 turns and finger counts in the capacitors, from 5 to 11 within the defined area and line widths. As a result, low-T-cured (150 °C) silver ink meander line inductors achieved 8 to 18 nH inductances at 1 and 2 GHz with a quality value of 10--25. High-T-cured (850 °C) silver ink meander line inductors had 6--15 nH inductances and quality values were around 100, indicating a conductivity challenge with low-T-cured inks. Interdigital capacitors with 1 to 4 pF capacitances and sufficient quality values were created. A low-loss BaTiO<inf>3</inf>coating was printed over the interdigital capacitors; they exhibited suitable electrical characteristics to allow decreasing the physical size of the component.
- 2013-05-25
著者
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TEIRIKANGAS Merja
Microelectronics and Materials Physics Laboratories, University of Oulu
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JUUTI Jari
Microelectronics and Materials Physics Laboratories, University of Oulu
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JANTUNEN Heli
Microelectronics and Materials Physics Laboratories, University of Oulu
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Jakubowska Malgorzata
Faculty of Mechatronics, Warsaw University of Technology, 00-661 Warsaw, Poland
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Jakubowska Malgorzata
Faculty of Mechatronics, Warsaw University of Technology, 02-525 Warsaw, Poland
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Nelo Mikko
Microelectronics and Materials Physics Laboratories, University of Oulu, FI-90014, Oulu, Finland
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Sloma Marcin
Faculty of Mechatronics, Warsaw University of Technology, 00-661 Warsaw, Poland
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Myllymaki Sami
Microelectronics and Materials Physics Laboratories, University of Oulu, P. O. Box 4500, FI-90014, Oulu, Finland
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Tulppo Joel
Microelectronics and Materials Physics Laboratories, University of Oulu, P. O. Box 4500, FI-90014, Oulu, Finland
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Sobociński Maciej
Microelectronics and Materials Physics Laboratories, University of Oulu, P. O. Box 4500, FI-90014, Oulu, Finland
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Sloma Marcin
Faculty of Mechatronics, Warsaw University of Technology, 02-525 Warsaw, Poland
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Jantunen Heli
Microelectronics and Materials Physics Laboratories, University of Oulu, P. O. Box 4500, FI-90014, Oulu, Finland
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