Polymer Science in Nanoimprint Lithography
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概要
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関連論文
- Fabrication of Diffractive Optical Elements on a Si Chip by Imprint Lithography using Novel Mold (特集 複雑な構造を多様な材料で実現する技術)
- Novel Mold Fabrication for Nano-Imprint Lithography to Fabricate Single-Electron Tunneling Devices
- Resonance Characteristics of Micro Cantilever in Liquid
- Fine Pattern Fabrication on a Polymer Plate by Direct Imprint Lithography (特集 複雑な構造を多様な材料で実現する技術)
- Polymer Science in Nanoimprint Lithography
- 25nm wide silicon trench fabrication by edge lithography (Special issue: Dry process)
- Study on Polymer Materials Evaluation System for Nano-Imprint Lithography
- Simulation of Resist Filling Properties under Condensable Gas Ambient in Ultraviolet Nanoimprint Lithography (Special Issue : Microprocesses and Nanotechnology)