1-3A09 レーザ法による超微粒子合成における核発生と粒成長

概要

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Characteristics of the SiC powder synthesized by ArF excimer laser (193nm) was compared with those of CO_2 laser irradiation to study grain growth mechanism of particles by vapor phase reaction. Specific-surface-area of SiC powder prepared by CO_2 laser irradiation was decreased with increasing residence time, where as it was increased with increasing residence time increase of excimer laser irradiation. Grain growth under the irradiation of CO_2 laser was considered to be controlled by the condensation-dominant-mechanism. In contrast to this, grain size of the particles under the irradiation of excimer laser seemed to do influenced by combined mechanisms of nucleation growth and laser abrasion.
1995-10-03