2F25 ジョセフソントンネル接合のための高品質 YBa_2Cu_3O_<7-δ> 薄膜の作製
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For fabricating high quality a-axis oriented YBa_2Cu_3O_<7-δ>(YBCO) thin films, either PrBa_2Cu_3O_<7-δ> (PBCO) template layer or YBCO buffer layer deposited by temperature gradient was inserted between SrTiO_3(100) substrate and the YBCO film. Crack formation was observed on YBCO thin films deposited by PBCO template layer presumably due to stress originated from thermal expansion mismatch. On the other hand, no crack was observed in the films deposited by the temperature gradient method, presumably due to relaxation of the stress in the temperature gradient layer. RHEED pattern of these films showed streak pattern, indicating the flat film surface. Tc(Zero) of these films exceeded 80K.
- 1995-03-28
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