2D06 リン化ホウ素のサファイア単結晶上のエピタキシャル成長 (II)

概要

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BP single crystalline layer was grown on sapphire single crystalline substrate. The orientation relationship was (111)BP/(0001) sapphire; [11^^-0] BP// [112^^-0] sapphire, [112^^-] BP//[1^^-010] sapphire. The obtained film exhibited p-type conduction and the electrical resistivity, carrier concentration, and mobility were 529Ω・cm, 3.81×(10)^<15>(cm)^<-3>, 3.5(cm)^2/s・V, respectively, indicating the autodopings from the substrate.
1992-05-20