Growth of Thick GaN Layers by Hydride Vapor Phase Epitaxy on Sapphire Substrate with Internally Focused Laser Processing
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概要
- 論文の詳細を見る
High-quality thick GaN layers were directly grown by hydride vapor phase epitaxy on sapphire substrates preliminary processed by a laser beam focused within the substrate. The critical thickness for crack generation was improved drastically from 10--20 μm for regular substrates to 220--250 μm by using the laser processed sapphire substrates. Layers of 200 μm thickness grown on the laser processed sapphire substrates exhibited a crack-free surface over the entire 2-in. area and a threading dislocation density as low as 1\times 10^{7} cm<sup>-2</sup>, which is one order of magnitude lower than that achievable with a regular sapphire substrate.
- 2013-03-25
著者
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Aida Hideo
Namiki Precision Jewel Co., Ltd., 3-8-22 Shinden, Adachi-ku, Tokyo 123-8511, Japan
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Aota Natsuko
Namiki Precision Jewel Co., Ltd., 3-8-22 Shinden, Adachi-ku, Tokyo 123-8511, Japan
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Takeda Hidetoshi
Namiki Precision Jewel Co., Ltd., 3-8-22 Shinden, Adachi-ku, Tokyo 123-8511, Japan
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Grandjean Nicolas
Institute of Condensed Matter Physics, Ecole Polytechnique Fédérale de Lausanne, CH-1015 Lausanne, Switzerland
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Aoyagi Tomohide
Namiki Precision of Europe SA, Parc Scientifique de I'EPFL, PSE-D, CH-1015 Lausanne, Switzerland
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Koyama Koji
Namiki Precision Jewel Co., Ltd., Adachi, Tokyo 123-8511, Japan
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Martin Denis
Institute of Quantum Electronics and Photonics, École Polytechnique Fédérale de Lausanne (EPFL), CH-1015 Lausanne, Switzerland
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Ikejiri Kenjiro
Namiki Precision Jewel Co., Ltd., Adachi, Tokyo 123-8511, Japan
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Takeuchi Misaichi
Ritsumeikan Global Innovation Research Organization, Ritsumeikan University, Kusatsu, Shiga 525-8577, Japan
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Kim Seong-woo
Namiki Precision Jewel Co., Ltd., Adachi, Tokyo 123-8511, Japan
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Martin Denis
Institute of Quantum Electronics and Photonics, École Polytechnique Fédérale de Lausanne (EPFL), CH-1015 Lausanne, Switzerland
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Grandjean Nicolas
Institute of Quantum Electronics and Photonics, École Polytechnique Fédérale de Lausanne (EPFL), CH-1015 Lausanne, Switzerland
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Aida Hideo
Namiki Precision Jewel Co., Ltd., Adachi, Tokyo 123-8511, Japan
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Takeda Hidetoshi
Namiki Precision Jewel Co., Ltd., Adachi, Tokyo 123-8511, Japan
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KIM Seong-woo
Namiki Precision Jewel Co., Ltd.
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TAKEDA Hidetoshi
Namiki Precision Jewel Co., Ltd.
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