Pulsed Electron Deposition of 50-nm-thick ZnO Film at Room Temperature
スポンサーリンク
概要
- 論文の詳細を見る
We used pulsed electron deposition (PED) method to grow 50-nm-thick ZnO thin film on quartz and Si substrate at room temperature. X-ray diffraction (XRD) measurement shows the (002) peak with full width at half maximum (FWHM) of 0.87\circ. Photoluminescenct (PL) and IR transmission data exhibit the energy band gap (3.3 eV) and optical phonon frequency (50.7 meV) which are consistent with those of single crystal ZnO. Visible--UV transmission level is enhanced when oxygen partial pressure in the growth chamber increases. Our results prove that thin ZnO film with reasonable structural, surface and optical property can be grown at low temperatures using PED method.
- 2011-12-25
著者
-
Park J.
Department Of Aerospace Engineering Korea Advanced Institute Of Science And Technology (kaist)
-
Park J.
Department of Physics, Soongsil University, Seoul 156-743, Republic of Korea
-
Rho Jaehoon
Department of Physics, University of Seoul, Seoul 130-743, Republic of Korea
-
Yu Kwangnam
Department of Physics, University of Seoul, Seoul 130-743, Republic of Korea
-
Jeong Rok-Hwan
Department of Physics, University of Seoul, Seoul 130-743, Republic of Korea
-
Chung J.-S.
Department of Physics, Soongsil University, Seoul 156-743, Republic of Korea
-
Choi Eunjip
Department of Physics, University of Seoul, Seoul 130-743, Republic of Korea
関連論文
- A synthesis procedure for associative memories based on space-varying cellular neural networks
- Progressive failure analysis of filament wound composite pressure vessels considering the change of winding angles through-the thickness direction
- Residual Stress in Composites with the Thin-ring-slitting Approach
- Comparative Evaluation of Protective Coatings during Accelerated Deterioration
- Oxygen Plasma Reactive Ion Etching of Tetrahedral Amorphous Carbon
- LPE-Garnet Base Magneto-Optic Spatial Light Modulator
- Electronic structure of s,p- and 3d-element impurities in ferromagnetic Fe
- Effects of climate change on environmental risks of agricultural contaminants in Korea(Implications of Climate Change in Terms of Pesticide Use and Risk,2) Environmental Fate and Safety Assessment)
- Design of New Ultra Low-dielectric Materials and Characterization
- High Temperature Oxidation of TiAl/SiC_p Composites Manufactured by MA-SPS Process
- 韓国で魚から分離されたビルナウイルスの生化学的ならびに血清学的性状
- Pulsed Electron Deposition of 50-nm-thick ZnO Film at Room Temperature