Direct Growth Properties of Graphene Layers on Sapphire Substrate by Alcohol-Chemical Vapor Deposition
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概要
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Few nanometers thick graphene layers were directly grown on a-plane (11\bar{2}0) sapphire substrates by alcohol-chemical vapor deposition (alcohol-CVD) using ethanol as a carbon source and without any catalytic metal on the substrate surface. The growth relationship between the graphene layer and substrate was analyzed using a transmission electron microscope (TEM). The growth rate of graphene layers with different growth temperatures revealed that the Al atom act as a catalyst for synthesizing a graphitic material during the decomposition of ethanol. An optical transmittance and a sheet resistance of the graphene sheet directly grown on sapphire substrate were observed. SiO2/Si and n-6H-SiC substrates were also examined for graphene direct growth to discuss the catalytic behavior of Si atoms compared with Al atoms.
- 2012-04-25
著者
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NAKAMURA Atsushi
Research Institute for Information Science and Education, Hiroshima University
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Temmyo Jiro
Reseach Institute of Electronics, Shizuoka University, Hamamatsu 432-8011 Japan
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Temmyo Jiro
Research Institute of Electronics, Shizuoka University, Hamamatsu 432-8011, Japan
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Miyasaka Yuta
Research Institute of Electronics, Shizuoka University, Hamamatsu 432-8011, Japan
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