The Orientation and Grain Texture Effect on Life Time Reliability of Sol--Gel Derived PbZr0.52Ti0.48O3 Films
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概要
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We fabricated Pb(Zr,Ti)O3 (PZT) films with different orientations and grain textures by the sol--gel method. The fabricated films were tested using the high accelerated lifetime testing system. As a result, films with coarse grain texture exhibited longer lifetimes and a higher acceleration factor than those with fine-grained texture. The film orientation did not affect the mean time to failure of the film. This suggests that breaking phenomena are strongly dependent on the number of grain boundaries.
- 2012-09-25
著者
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SOYAMA Nobuyuki
Central Research Institute, Mitsubishi Materials Corporation
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Noguchi Takashi
Central Research Laboratory Mitsubishi Electric Corporation
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Fuji Jun
Central Research Institute, Mitsubishi Materials Corporation, Naka, Ibaraki 311-0102, Japan
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Doi Toshihiro
Central Research Institute, Mitsubishi Materials Corporation, Naka, Ibaraki 311-0102, Japan
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Sakurai Hideaki
Central Research Institute, Mitsubishi Materials Corporation, Naka, Ibaraki 311-0102, Japan
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Soyama Nobuyuki
Central Research Institute, Mitsubishi Materials Corporation, Naka, Ibaraki 311-0102, Japan
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- The Orientation and Grain Texture Effect on Life Time Reliability of Sol--Gel Derived PbZr0.52Ti0.48O3 Films