Design of Nanosprings Using Si/SiGe Bilayer Thin Film

概要

論文の詳細を見る
An equilibrium configuration of a Si/SiGe bilayer thin film is investigated using the finite element method. In the $\langle 100 \rangle$ direction, a nanoband, nanoring, and nanopipe are shaped in turn as the width-to-thickness ratio increases. In the $\langle 110 \rangle$ direction, a nanoband, nanospring, and nanopipe are shaped. The type of curved shape is determined by the width-to-thickness ratio and tilt angle from the $\langle 110 \rangle$ direction. The pitch angle of the nanospring is determined by the tilt angle from the $\langle 110 \rangle$ direction. The helix diameter is determined by the thickness, thickness ratio of the two layers, and composition ratio of the SiGe layer.
2011-07-25