Diffuser Micropump Structured with Extremely Flexible Diaphragm of 2-μm-thick Polyimide Film

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概要

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• A miniaturized diffuser/nozzle micropump with extremely thin (only 2.1 μm in thickness) polyimide (PI) membranes was fabricated on a 60-μm-thick Si wafer using simple photolithography processes. The diameter of the diaphragm was 2 mm, and the chamber depth was 60 μm. The micropump was functioned by deforming the membranes with alternating air pressure. The ethanol flow rate of the micropump was over 400 nl/min at 2.5 Hz with an actuated pressure of 5 kPa. The measured flow rate was relatively higher than those of previously reported micropumps with a similar chamber volume owing to the large deflection (over 40 μm) of the PI membrane. The micropump processing issues of plasma induced damage to the PI membrane during Si chamber etching and the behaviors of the static and dynamic deflections of the PI membrane was also discussed. On the basis of the advantages of photolithography processes and the good performance of the micropump, it is expected that the micropump can be fabricated on silicon integrated circuit chips.

• 2011-04-25

著者

• Imai Satomitsu

  Department Of Mechanical Engineering Tokyo Metropolitan College Of Aeronautical Engineering

• Liu Yingwei

  Department Of Precision Machinery Engineering College Of Science And Technology Nihon University

• Komatsuzaki Hiroki

  Department Of Precision Machinery Engineering College Of Science And Technology Nihon University

• Duan Zongfan

  Department of Precision Machinery Engineering, College of Science and Technology, Nihon University, Funabashi, Chiba 274-8501, Japan

• Nishioka Yasuhiro

  Department of Precision Machinery Engineering, College of Science and Technology, Nihon University, Funabashi, Chiba 274-8501, Japan

• Imai Satomitsu

  Department of Precision Machinery Engineering, College of Science and Technology, Nihon University, Funabashi, Chiba 274-8501, Japan

• Komatsuzaki Hiroki

  Department of Precision Machinery Engineering, College of Science and Technology, Nihon University, Funabashi, Chiba 274-8501, Japan

• Liu Yingwei

  Department of Precision Machinery Engineering, College of Science and Technology, Nihon University, Funabashi, Chiba 274-8501, Japan

関連論文

• Fabrication of a Valveless Micropump with Polyimide Membrane
• Verification of the Mechanism of the Head-Positioning Error Caused by Disk Flutter and Slider Supporting Structure for Reducing Head-Positioning Error
• Diffuser Micropump Structured with Extremely Flexible Diaphragm of 2-μm-thick Polyimide Film
• Effect of 2-Propanol Concentration in Electrolyte Solution on Polypyrrole Actuator Performance
• Flexible polyimide micropump fabricated using hot embossing (Special issue: Microprocesses and nanotechnology)

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