Diamond-like Carbon Films Deposited at Room Temperature on Flexible Plastics Substrates for Antireflection Coating

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概要

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• In this present work, diamond-like carbon (DLC) films were coated onto polycarbonate (PC) substrates as a protective layer at room temperature by radio frequency (rf) magnetron sputtering technique. The $I_{\text{D}}/I_{\text{G}}$ ratio, roughness ($R_{\text{a}}$), and contact angle of amorphous DLC films could be controlled by regulating deposition power. The DLC films deposited at 150 W with a good hardness of as high as 13.74 GPa were realized with a surface roughness and contact angle of 0.63 nm ($R_{\text{a}}$) and 103°, respectively. Ultraviolet/visible (UV/vis) spectrophotometry of single-layer DLC films showed a high transmissive ability (${>}80$%) in the visible wavelengths. No cracks occurred on the surface of DLC films after the flexibility test 500 times at a frequency of 8.6 min-1. This confirms the excellent adhesion of DLC films on PC plastic substrates with potential applications in flexible optoelectronic devices.

• 2011-03-25

著者

• Chang Chien-kuo

  Graduate Institute Of Mechanical And Electrical Engineering National Taipei University Of Technology

• Peng Kang

  Institute of Mechatronic Engineering, National Taipei University of Technology, Taipei 10608, Taiwan

• Liao Wen-Hsiang

  Graduate Institute of Mechanical and Electrical Engineering, National Taipei University of Technology, Taipei 10608, Taiwan

• Chang Chien-Kuo

  Graduate Institute of Mechanical and Electrical Engineering, National Taipei University of Technology, Taipei 10608, Taiwan

• Lin Chii-Ruey

  Graduate Institute of Manufacturing Technology, National Taipei University of Technology, Taipei 10608, Taiwan

• Wei Da-Hua

  Graduate Institute of Manufacturing Technology, National Taipei University of Technology, Taipei 10608, Taiwan

関連論文

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• Diamond-like Carbon Films Deposited at Room Temperature on Flexible Plastics Substrates for Antireflection Coating
• Improvement in the Frequency Response of Loudspeakers by Using Diamond-Like Carbon Film Coatings
• Application of Nitrified Steel Deposit Diamond-Like Carbon Film in Explosive Environment

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