Mechanism of Aluminum Induced Lateral Crystallization of Amorphous Silicon
スポンサーリンク
概要
- 論文の詳細を見る
The aluminium-induced lateral crystallization (AILC) of amorphous silicon (a-Si) on a glass substrate has been investigated. By means of a photoresist-based process, Al islands (100 nm) were thermally evaporated using 15 V, 3.5 A, and 25 V, 5.6 A on the a-Si layer (100 nm), which was deposited on a glass substrate. SEM examinations indicated that the Al islands exhibited smooth and crystalline-grain morphology. Annealing processes were carried out at 748 and 823 K for various times. After annealing, AILC could be clearly observed in the crystalline-grain sample, but not in the smooth sample. TEM analyses showed that the mechanism of AILC resulted from two layer exchange processes. First, the Al islands exchanged with the underlying a-Si layer vertically during AIC, and then the generation of Al particles accompanying AIC caused a lateral layer exchange with the remaining a-Si layer with further annealing.
- 2010-09-25
著者
-
Liu Tzeng-feng
Department Of Materials Science And Engineering National Chiao-tung University
-
Lin Chih-lung
Department Of Neurosurgery Chang Gung Memorial Hospital
-
Tsai Yu-Lin
Department of Materials Science and Engineering, National Chiao Tung University, Hsinchu City 300, Taiwan, R.O.C.
-
Chao Cheun-Guang
Department of Materials Science and Engineering, National Chiao Tung University, Hsinchu 30010, Taiwan, R.O.C.
-
Huang Shih-Yang
Department of Materials Science and Engineering, National Chiao Tung University, Hsinchu City 300, Taiwan, R.O.C.
-
Wang Chuan-Chi
Department of Management Information System, Chin Min Institute of Technology, Miaoli County 351 Taiwan, R.O.C.
-
Lin Chih-Lung
Department of Materials Science and Engineering, National Chiao Tung University, Hsinchu City 300, Taiwan, R.O.C.
-
Chao Cheun-Guang
Department of Management Information System, Chin Min Institute of Technology, Miaoli County 351 Taiwan, R.O.C.
関連論文
- Effects of Rhenium on Microstructure and Phase Stability of MAR-M247 Ni-Base Fine-Grain Superalloy
- Influence of Rhenium on the Mechanical Behavior and Fracture Mechanism of a Fine-Grain Superalloy at Elevated Temperatures
- Formation of (B2+D0_3) Two-Phase Microstructure in a Fe-23 Al-7 Ti Alloy
- Mechanism of Aluminum Induced Lateral Crystallization of Amorphous Silicon
- The Long-Term Results of Upper Dorsal Sympathetic Ganglionectomy and Endoscopic Thoracic Sympathectomy for Palmar Hyperhidrosis
- Influence of Rhenium on the Grain Boundary Strength, Phase Evolution, and High Temperature Mechanical Properties of a Fine-Grain Nickel-Base Superalloy at 982℃
- Microstructure and Properties of Pb Nanowires Fabricated by Casting
- Comparison of the Kinematic Features Between the in vivo Active and Passive Flexion-Extension of the Subaxial Cervical Spine and Their Biomechanical Implications
- Sputter Deposition of Multi-Element Nanoparticles as Electrocatalysts for Methanol Oxidation
- Effect of Temperature and Extrusion Pass on the Consolidation of Magnesium Powders Using Equal Channel Angular Extrusion
- Effects of ECAE on Microstructures and Mechanical Properties of Solution Heat Treated Mg-5 (mass%) Sn Alloy