Transparent Flexible Zinc–Indium–Tin Oxide Thin-Film Transistors Fabricated on Polyarylate Films

概要

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Transparent flexible displays can be realized using active matrix organic light emitting device (AMOLED) with transparent electrodes on transparent plastic substrates. In this study, we developed low-temperature, high-performance [ZITO, $\text{ZnO}:\text{In$_{2}$O$_{3}$}:\text{SnO$_{2}$}=3:1:1$ molar ratio] thin-film transistors (TFTs) on polyarylate films. After optimizing the sputtering condition, the ZITO TFT with an ITO electrode had a high mobility of 16.93 cm2 V-1 s-1, and an SS of 0.39, while the ZITO TFT with a ZTO:B electrode showed no hysteresis on sweeping, a mobility of 2.29 cm2 V-1 s-1 and an SS of 0.18.
2010-05-25