Characteristics of a Low-Damage GaN-Based Light-Emitting Diode Using a KOH-Treated Wet-Etching Approach

概要

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A GaN-based light emitting diode (LED) with an air-buffer layer and textured sidewalls is fabricated and investigated. A hot KOH etching solution is used to develop the desired textured sidewalls. Many sidewalls with triangular-like shape are produced along the specific direction of $\langle 1\bar{1}00 \rangle$, where photons introduced within multiple-quantum-well (MQW) exhibit more opportunities to scatter into the air. Based on the lateral etching, many triangular-shaped cones are formed on the patterned sapphire substrate (PSS). At 20 mA, as compared with the LED without KOH treatment, the studied device exhibits improved output power by 11.7% without deteriorating its electrical characteristics. This phenomenon can be attributed to the enhanced output light from vertical and lateral directions due to the formation of an air-buffer layer as well as textured sidewalls. The thermal reliability of the studied device is also comparable to the one without KOH-treated process.
2009-08-25