Magnetic Effect during Copper Electroplating Using Electrochemical Impedance Spectroscopy
スポンサーリンク
概要
- 論文の詳細を見る
In this paper, the effect of the intensity of the magnetic field on copper electroplating was investigated. Our results indicate that the variation of the magnetic field on the surface of the cathode electrode affected the electroplating rate of the electroplated copper film. By increasing the intensity of the magnetic field, the copper-electroplating rate increases. However, the magnetic field did not affect the grain sizes or shapes of the copper electroplated films. Electrochemical impedance spectroscopy (EIS) was used to analyze the electrochemical effect of the magnetic field during the copper electroplating process. Cyclic-voltammetry stripping, and cell voltage versus plating time were examined to clarify the acceleration behavior of the magnetic field. The proposed equivalent circuit shows that the magnetic field enhanced the copper-electroplating rate by decreasing the charge-transfer resistance as well as the resistance of the diffusion layer.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2009-07-25
著者
-
Chang Shih-chieh
Department Of Industrial Engineering And Systems Management Feng Chia University
-
Lee Wen-hsi
Department Of Electrical Engineering National Cheng Kung University
-
Hung Chi-Cheng
Department of Electrical Engineering, National Cheng Kung University, Tainan 701, Taiwan, R.O.C.
-
Hung Chi-Cheng
Department of Electrical Engineering, National Cheng Kung University, Tainan 701, Taiwan
-
Hwang Gwo-Jen
Colledge of Science and Engineering, National University of Tainan, Tainan 701, Taiwan, R.O.C.
-
Wang Ying-Lang
Department of Electrical Engineering, National Chiayi University, Chiayi 600, Taiwan, R.O.C.
-
Wang Ying-Lang
Department of Electrical Engineering, National Chi-Nan University, Nan-tou, Taiwan 54561, Republic of China
-
Chang Shih-Chieh
Department of Electrical Engineering, National Chiayi University, Chiayi 600, Taiwan, R.O.C.
関連論文
- 肝転移を伴った犬の空回腸間膜由来脂肪肉腫の1例(外科学)
- 頭蓋内転移を起こした膵腺房細胞癌の犬の一例(外科学)
- Study on low temperature sintering and microwave dielectric properties of Ba_2Ti_9O_-based ceramics(Aqueous Solution Science for Ceramic Processing II)
- Phase development and dielectric properties of BaAl_2Si_2O_8-based low temperature co-fire ceramic material
- Evolution of Fluorine Content with Precipitate Formation in Fluorine-Doped Silicon Oxide
- Effect of Electron Flow Direction and Via Number on Electromigration Mechanism for Copper Dual Damascene Interconnects
- 2A3 ORDER COMMITMENT CONTRACTS IN A COLLABORATIVE SUPPLY CHAIN
- Study on Preparation of High-k Organic-Inorganic Thin Film for Organic-Inorganic Thin Film Transistor Gate Dielectric Application
- Investigation of Dielectric Properties of BaZr(BO3)2 Ceramics
- Effects of Glass Addition on Microwave Dielectric Properties of Zn0.95Mg0.05TiO3 + 0.25TiO2 Ceramics
- Microwave Dielectric Properties of Zn0.95Mg0.05TiO3 + 0.25TiO2 Ceramics with 3ZnO–B2O3 Addition
- Measurement Techniques of Sheet Resistance on Copper Defects after Chemical Mechanical Polishing
- Investigation of Copper Scratches and Void Defects after Chemical Mechanical Polishing
- Magnetic Effect during Copper Electroplating Using Electrochemical Impedance Spectroscopy
- Relationship between Microstructure and Electrical Properties of ZnO-based Multilayer Varistor
- Characteristic of Organic Thin Film Transistor with a High-$k$ Insulator of Nano-TiO2 and Polyimide Blend
- 3G0900-2 Fog affects CO_2 fluxes in a mountainous forest ecosystem in Taiwan(Preconference of International Conference on Fog, Fog Collection and Dew,Special Meeting 3)