In-situ Visualization and Two Dimensional Mapping of Local Electric Field at Probe Apex Using Scanning Electron Optical System

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概要

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• We demonstrate an in-situ visualization of electric field distribution and the two-dimensional (2D) mapping of a local field by using a conventional scanning electron microscopy (SEM) system combined with a grid detector. The deflection of the primary electron that obeys Rutherford scattering projects a cross grid shape to a shadow constructed by concentric rings and radial spokes that appear to superimpose immediately behind the conventional SEM image. The correlation of the beam scanning position with the deflection position gives the true local field intensity, and thus, the 2D electric field distribution is obtained. The resulting 2D field distribution agrees well with the field element method (FEM) simulation.

• 2009-06-25

著者

• Fujita Jun-ichi

  PRESTO JST, Japan Science and Technology Agency, Kawaguchi, Saitama 332-0012, Japan

• Fujita Jun-ichi

  PRESTO, Japan Science and Technology Agency, Kawaguchi, Saitama 332-0012, Japan

• Ikeda Yuta

  PRESTO, Japan Science and Technology Agency, Kawaguchi, Saitama 332-0012, Japan

• Suzuki Ikumi

  PRESTO, Japan Science and Technology Agency, Kawaguchi, Saitama 332-0012, Japan

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• In-situ Visualization and Two Dimensional Mapping of Local Electric Field at Probe Apex Using Scanning Electron Optical System

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