A Novel Deformable Mirror for Spherical Aberration Compensation
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概要
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We considered whether spherical aberration could be compensated differently from the conventional manner, that is, to deform a mirror into the desired shape and compensate for spherical aberration. We tried to include this function in a 45° mirror. Using conventional micro electro machine system (MEMS) processes, we successfully developed a highly accurate and easily controllable deformable mirror with a simple structure.
- 2009-03-25
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