Temperature Sensing by Using Film Bulk Acoustic Resonator at 2.4 GHz Band

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概要

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• A four-layered film bulk acoustic resonator (FBAR) with an Al/AlN/SiN/Au composite structure was fabricated. The FBAR is composed of a surface micromachined cantilever whose copper scarification layer is released by wet etching. A temperature coefficient (TC) of resonant frequency of $-34.5$ ppm/°C in the temperature range from 10 to 80 °C at 2.4 GHz is obtained. Using this resonator, an oscillator for temperature sensing was constructed, in which temperature can be detected easily by measuring the shift in oscillation frequency. The TC of the oscillator is almost the same as that of the resonator.

• 2009-11-25

著者

• Kao Yao-huang

  Department Of Communication Engineering Chung-hua University

• Lin Jon-Hong

  Department of Communication Engineering, National Chiao Tung University, Hsinchu 300, Taiwan

• Kao Yao-Huang

  Department of Communication Engineering, Chung Hua University, Hsinchu 300, Taiwan

関連論文

• A High Performance Spread Spectrum Clock Generator Using Two-Point Modulation Scheme
• Temperature Sensing by Using Film Bulk Acoustic Resonator at 2.4 GHz Band

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