Difference–Sum Generalized Ellipsometry Method for Thin Films with Small Optical Anisotropy

概要

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We have devised a difference–sum generalized ellipsometry method for measuring the optical properties of anisotropic thin films. This method enables the evaluation of samples with a small anisotropy because of the two effects of P- or S-polarized incident light and the noise reduction by the difference measurement, which is difficult with the conventional methods. We measured a rubbed polyimide film on a glass substrate and showed that this method enables the measurement of the phase difference $\Delta_{\text{ps}}$ and amplitude $|r_{\text{ps}}|/|r_{\text{ss}}|$ ($\equiv\tan\Psi_{\text{ps}}$) of the normalized Jones matrix of a sample whose $\tan\Psi_{\text{ps}}$ is as small as $2 \times 10^{-3}$, which is near the expected maximum ability restricted by the quality of polarizer used in the measurement system for demonstration.
2009-11-25