Dual Piezoelectric Actuation Bridge of In-Plane Polarized Lead Zirconate Titanate Film

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概要

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• A dual piezoelectric actuation bridge of in-plane polarized lead zirconate titanate (PZT) film is demonstrated. The in-plane polarized PZT film makes the development of a bending mechanism in the $d_{33}$ mode, which exhibits a strain performance twice that of the $d_{31}$ mode. Further, this design can provide deflection exceeding the structure thickness and individual driving mechanism for improving reliability of the devices. In order to simplify the fabrication process, a photoresist and Au are selected for the sacrificial and structural materials, respectively. The PZT thin film, which is deposited on the Au structural layer by the RF magnetron sputtering method, is poled and driven with interdigitated electrodes (IDEs) in order to exploit $d_{33}$ mode actuation. The fabricated actuator exhibits good performance with a fast response time of ${<}500$ ms and low driving voltage of 5 V. This design can also be applied for a linearly tunable capacitor, depending on the magnitude of biasing voltage.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2008-08-25

著者

• Hwang Hyun-Suk

  Division of Fusion Technology, Korea Institute of Ceramic Engineering and Technology, Seoul 233-5, Korea

• Song Joon-Tae

  School of Information and Communication Engineering, Sungkyunkwan University, Suwon 440-746, Korea

関連論文

• Dual Piezoelectric Actuation Bridge of In-Plane Polarized Lead Zirconate Titanate Film

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