Numerical Simulations and Experiments about Contamination Mechanism of Solid Immersion Lens System Concerning Hole and Geometries of Lens Holder
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概要
- 論文の詳細を見る
The air flow field around a conical type solid immersion lens (SIL) system is simulated numerically and confirmed with experiment using a micro-particle image velocimetry (PIV) system. It is found that the back-flow from the downstream of the SIL is a major candidate for the contamination of the SIL. Five modifications are proposed to suppress the particle conveying mechanism, the back-flow. Among these modifications a method using two flow-bypasses reduces the back-flow most effectively, which connects the top surface of the SIL system and two side-holes of the lens holder where the static pressure is the minimum.
- 2008-07-25
著者
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CHOI In-Ho
Digital Media Research Laboratory, LG Electronics Inc.
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Seo Jeong-Kyo
Digital Storage Lab., DSF Group, LG Electronics Inc., Kyoung-gi 463-828, Korea
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Choi Moon-Ho
Graduate School of Yonsei University, Seoul 120-749, Korea
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Yang Tae-Man
Graduate School of Yonsei University, Seoul 120-749, Korea
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Rhim Yoon-Chul
School of Mechanical Engineering, Yonsei University, Seoul 120-749, Korea
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Min Byung-Hoon
Digital Storage Lab., DSF Group, LG Electronics Inc., Kyoung-gi 463-828, Korea
関連論文
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- Improvement of Cover-Layer Surface Properties for Near-Field Optical Recording
- Numerical Simulations and Experiments about Contamination Mechanism of Solid Immersion Lens System Concerning Hole and Geometries of Lens Holder
- Force Characteristics of Slim Pickup Actuator to Improve Actuating Performances