Investigation on Laser Assisted Direct Imprinting Parameters for Fabricating Micro- and Nano-Structures

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概要

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• This paper experimentally investigates the dominant parameters in performing laser assisted direct imprinting (LADI) process, which utilizes quartz molds, pulsed laser heating, and contact pressure for direct fabricating micro/nano-structures on a silicon substrate. Based on pulsed laser heating, liquid film squeezing, and elastodynamic theories, a unified theory has been successfully developed before which can quantitatively explains the fundamental mechanism of LADI and predicts the correlations between the final imprinting depth and several important parameters including laser fluence, contact pressure, and feature size. To verify this theory, a series of LADI experiments have been carried out in this work. Experimental results, in their general trends, are in agreement with the theoretical predictions and therefore supporting the validity of the modeling. It also shows that further modifications on the theoretical model are needed based on the experimental results. Physical implications and potential applications of this modeling will be addressed.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2008-06-25

著者

• Lee Yung-chun

  Department Of Mechanical Engineering National Cheng Kung University

• Hsiao Fei-Bin

  Department of Aeronautics and Astronautics, National Cheng Kung University, Tainan, Taiwan

• Chuang Cheng-Hsin

  Department of Mechanical Engineering, Southern Taiwan University of Technology, Tainan, Taiwan

• Chuang Cheng-Hsin

  Department of Mechanical Engineering and Institute of Nanotechnology, Southern Taiwan University, Tainan 71005, Taiwan

• Lee Yung-Chun

  Department of Mechanical Engineering, National Cheng Kung University, Tainan, Taiwan

• Chang Shuo

  Mechanical and Systems Research Laboratory, Industrial Technology Research Institute, Hsinchu, Taiwan

• Ruan Jun-Yi

  Institute of Nanotechnology and Microsystems Engineering, National Cheng Kung University, Tainan, Taiwan

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