Enhanced Decomposition of CF4 in Atmospheric-Pressure Nonthermal Nitrogen Plasmas by Pulsed-Electron-Beam Pumping

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概要

• 論文の詳細を見る

• The decomposition of CF4 using pulsed-electron-beam-generated atmospheric-pressure nonthermal nitrogen plasmas (CF4 900 ppm, 130 kPa) is demonstrated. A high energy efficiency was obtained in the destruction and removal of CF4 compared with the results obtained using dielectric-barrier-discharge plasmas. The results are mainly attributed to the enhanced decomposition of CF4 by nitrogen ions that are efficiently generated by high-energy electron beams. The scavenging of reactive intermediates from the plasma without producing hydrogen fluoride is also attempted and its validity is discussed.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2008-10-25

著者

• Matsumoto Yuji

  Energy Technology Research Institute, National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki 305-8568, Japan

• Okuda Isao

  Energy Technology Research Institute, National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki 305-8568, Japan

• Takahashi Eiichi

  Energy Technology Research Institute, National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki 305-8568, Japan

• Kato Susumu

  Energy Technology Research Institute, National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki 305-8568, Japan

関連論文

• Decomposition of CF4 Using Pulsed-Electron-Beam-Generated Atmospheric-Pressure Low-Temperature Plasmas
• Enhanced Decomposition of CF4 in Atmospheric-Pressure Nonthermal Nitrogen Plasmas by Pulsed-Electron-Beam Pumping

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