Oxide Growth Rate Enhancement of Silicon Carbide (0001) Si-Faces in Thin Oxide Regime
スポンサーリンク
概要
- 論文の詳細を見る
Thermal oxidation process of silicon carbide (SiC) has been studied by performing in-situ spectroscopic ellipsometry. In our previous work, we, for the first time, found that the growth rates of SiC(000 (1) over bar) C-face at oxidation thicknesses less than around 20 nm are much higher than those given by the Deal-Grove (D-G) model. In this report, we show that such a growth rate enhancement occurs also in the oxidation of SiC(0001) Si-face. By applying the empirical equation proposed by Massoud et al. [J. Electrochem. Soc. 132 (1985) 2685] to the oxidation of SiC Si-face and comparing the temperature and oxygen partial pressure dependences of oxidation rate parameters obtained with those for C-face, we discuss the difference in oxidation mechanism between SiC Si- and C-faces. [DOI: 10.1143/JJAP.47.7803]
- 2008-10-25
著者
-
Yoshida Sadafumi
Division Of Mathematics Electronics And Informatics Graduate School Of Science And Engineering Saita
-
Hijikata Yasuto
Division Of Mathematics Electronics And Informatics Graduate School Of Science And Engineering Saita
-
Yamamoto Takeshi
Division Of Cardiology Department Of Internal Medicine Nippon Medical School
-
Yaguchi Hiroyuki
Division Of Mathematics Electronics And Informatics Graduate School Of Science And Engineering Saitama University
-
Hijikata Yasuto
Division of Mathematics, Electronics and Informatics, Graduate School of Science and Engineering, Saitama University, 255 Shimo-Okubo, Sakura-ku, Saitama 338-8570, Japan
-
Yaguchi Hiroyuki
Division of Mathematics, Electronics and Informatics, Graduate School of Science and Engineering, Saitama University, 255 Shimo-Okubo, Sakura-ku, Saitama 338-8570, Japan
-
Yamamoto Takeshi
Division of Mathematics, Electronics and Informatics, Graduate School of Science and Engineering, Saitama University, 255 Shimo-Okubo, Sakura-ku, Saitama 338-8570, Japan
-
Yoshida Sadafumi
Division of Mathematics, Electronics and Informatics, Graduate School of Science and Engineering, Saitama University, 255 Shimo-Okubo, Sakura-ku, Saitama 338-8570, Japan
関連論文
- PJ-068 Abnormally Tight Domain-Domain Interaction at Mutation Site could be a Primary Cause of Catecholaminergic Polymorphic Ventricular Tachycardia(PJ012,Calcium Handling, Cardiac Function (Basic) (M),Poster Session (Japanese),The 73rd Annual Scientific
- 3 Therapeutic Strategy for Acute Pulmonary Embolism : Current Status and Future Perspectives(Pulmonary Thromboembolism in Japan: Present and Future,Roundtable Discussion 9 (RT9) (H),The 70th Anniversary Annual Scientific Meeting of the Japanese Circulatio
- PJ-203 Dantrolene, a therapeutic agent for malignant hyperthermia, inhibits catecholaminergic polymorphic ventricular tachycardia : Insights from a RyR2 R2474S/+ knock-in mouse model(Arrhythmia, basic(05)(A),Poster Session(Japanese),The 72nd Annual Scient
- FRS-017 Enhanced Sensitivity of the Cardiac Ryanodine Receptor to Activation by Luminal Ca^ as a Primary Cause of CPVT(New Insights into Basic Mechanism of Arrhythmia(A),Featured Research Session,The 72nd Annual Scientific Meeting of the Japanese Circ
- PJ-765 Scavenging Free Radicals by Low-dose Carvedilol Prevents Redox-dependent Ca^ Leak via Stabilization of Ryanodine Receptor in Heart Failure(Development and differentiation-2, The 71st Annual Scientific Meeting of the Japanese Circulation Society
- PJ-103 Defective Domain-Domain Interaction within Ryanodine Receptor as a Critical Cause of Diastolic Ca^ Spark in Cardiomyocytes(Excitation-contraction coupling/Ion channel, The 71st Annual Scientific Meeting of the Japanese Circulation Society)
- OJ-249 Interruption of Specific Domain-domain Interaction within Ryanodine Receptor Mediates Stabilization of Ryanodine Receptor in Failing Hearts(Heart failure, basic-2, The 71st Annual Scientific Meeting of the Japanese Circulation Society)
- FRS-076 Correction of Defective Inter-Domain Interactions within Ryanodine Recepter by Dantrolene May be a Potent Therapeutic Strategy against Lethal Arrhythmia(Arrhythmia (basic), The 71st Annual Scientific Meeting of the Japanese Circulation Society)
- PJ-402 A Domain Which Has a Strong Effect to Stabilize the Ryanodine Receptor Exists inside the Ryanodine Receptor Itself(Heart failure, basic-5 (M) PJ68,Poster Session (Japanese),The 70th Anniversary Annual Scientific Meeting of the Japanese Circulation
- PJ-400 β-blocker Ameliorates Intracellular Ca^ Handling in Heart Failure via Correction of Defective Inter-domain Interaction within Ryanodine Receptor(Heart failure, basic-5 (M) PJ68,Poster Session (Japanese),The 70th Anniversary Annual Scientific Me
- PJ-175 Defective Inter-domain Interaction within the Ryanodine Recepter Plays a Key Role in the Pathogenesis of Heart Failure(Excitation-contraction coupling/Ion channel-2 (A) PJ30,Poster Session (Japanese),The 70th Anniversary Annual Scientific Meeting o
- Investigation of Positron Moderator Materials for Electron-Linac-Based Slow Positron Beamlines
- OE-274 Long-term QOL after PTSMA in symptomatic HOCM Comparing with Mild Grade Patients : Importance of preventing Sudden Death in All Cases(Cardiomyopathy, basic/clinical(01)(M),Oral Presentation(English),The 72nd Annual Scientific Meeting of the Japanes
- Effect of Resveratrol on Helicobacter pylori-Induced Interleukin-8 Secretion, Reactive Oxygen Species Generation and Morphological Changes in Human Gastric Epithelial Cells
- OJ-019 Dantrolene Stabilizes Domain-Domain Interactions within the Ryanodine Receptor in Failing Hearts(Heart failure, basic-2 (M) OJ4,Oral Presentation (Japanese),The 70th Anniversary Annual Scientific Meeting of the Japanese Circulation Society)
- Electrical Characteristics of Interface Defects in Oxides Grown at 1200℃ in Dry Oxygen Ambient on Silicon Carbide and Their
- Measurements of the Depth Profile of the Refractive Indices in Oxide Films on SiC by Spectroscopic Ellipsometry
- Annealing Properties of Defects in Ion-Implanted 3C-SiC Studied Using Monoenergetic Positron Beams
- Defects in Ion-Implanted 3C-SiC Probed by a Monoenergetic Positron Beam
- -0251- PREVENTION OF RESTENOSIS AFTER PTCA WITH COMBINATION OF ENARAPRIL AND TRANILAST(PROCEEDINGS OF THE 59th ANNUAL SCIENTIFIC MEETING OF THE JAPANESE CIRCULATION SOCIETY)
- Characterization of Oxide Films on SiC by Spectroscopic Ellipsometry
- Rab5a Regulates Surface Expression of FcεRI and Functional Activation in Mast Cells
- -1085- THE EFFECT OF ULTRA-LOW DOSE DOBUTAMIN ON LEFT VENTRICULAR ASYNCHRONY AND DIASTOLIC FUNCTION(PROCEEDINGS OF THE 59th ANNUAL SCIENTIFIC MEETING OF THE JAPANESE CIRCULATION SOCIETY)
- 7 Three-Year Follow-Up of the Safety and Feasibility of Intramyocardial Bone Marrow Mononuclear Cell Implantation in Patients with Ischemic Heart Disease(Symposium 8 (SY8) (M) : Regeneration Medicine of Cardiovascular Diseases)(Special Program)
- -0849- NEW APPROACHES TO EVALUATION OF THE CLINICAL SVERITY OF CHRONIC HEART FAILURE USING SUPERIOR VENA CAVA DOPPLER FLOW VELOCITY PATTERNS(PROCEEDINGS OF THE 59th ANNUAL SCIENTIFIC MEETING OF THE JAPANESE CIRCULATION SOCIETY)
- Optical Constants of Cubic GaN, AlN, and AlGaN Alloys
- Elongated shaped Si Island Formation on 3C-SiC by Chemical Vapor Deposition and Its Application to Antiphase Domain Observation
- Atomically Flat 3C-SiC Epilayers by Low Pressure Chemical Vapor Deposition
- Clinical Importance of Norepinephrine Spillover during Low Grade Exercise : A Novel Index for Severity of Chronic Heart Failure(Nuclear Cardiology 5 (I), The 69th Annual Scientific Meeting of the Japanese Circulation Society)
- -P478- CLINICAL SIGNIFICANCE OF SEROLOGICAL MARKERS OF COLLAGEN SYNTHESIS IN PATIENTS WITH DILATED CARDIOMYOPATHY(PROCEEDINGS OF THE 59th ANNUAL SCIENTIFIC MEETING OF THE JAPANESE CIRCULATION SOCIETY)
- -P139- THE EFFECT POSITIVE END-EXPIRATORY PRESSURE(PEEP)ON VENOUS RETURN : THE USEFULNESS OF PULSED DOPPLER ECHOCARDIOGRAPHY(PROCEEDINGS OF THE 59th ANNUAL SCIENTIFIC MEETING OF THE JAPANESE CIRCULATION SOCIETY)
- THE FUNCTIONAL ROLE OF COILED PERIMYSIAL FIBERS IN THE LEFT VENTRICULAR MYOCARDIUM OF PATIENTS WITH DILATED CARDIOMYOPATHY
- A Kinetic Model of Silicon Carbide Oxidation Based on the Interfacial Silicon and Carbon Emission Phenomenon
- Simultaneous Determination of Carrier Concentration, Mobility, and Thickness of SiC Homoepilayers by Infrared Reflectance Spectroscopy
- Oxide Growth Rate Enhancement of Silicon Carbide (0001) Si-Faces in Thin Oxide Regime
- Successful treatment of HCV-related cryoglobulinemic glomerulonephritis with double-filtration plasmapheresis and interferon combination therapy
- The Inhibitory Effect of Ergosterol, a Bioactive Constituent of a Traditional Japanese Herbal Medicine Saireito on the Activity of Mucosal-Type Mast Cells
- EVALUATION OF THE TREATMENT FOR SUPERIOR VENA CAVA SYNDROME USING PULSED DOPPLER ECHOCARDIOGRAPHY
- POSITIONAL CHANGES ON SUPERIOR VENA CAVA DOPPLER FLOW VELOCITY PATTERNS IN PATIENTS WITH CHRONIC HEART FAILURE
- Azelnidipine-induced chyloperitoneum in a patient with microscopic polyangiitis
- Guidelines for Clinical Use of Cardiac Nuclear Medicine (JCS 2010) : Digest Version
- A case of MPO-ANCA-positive polyarteritis nodosa complicated by exudative otitis media, mononeuritis multiplex, and acute renal failure
- Simultaneous Fenestration with Stent Implantation for Acute Limb Ischemia due to Type B Acute Aortic Dissection Complicated with Both Static and Dynamic Obstructions
- Micro-Photoluminescence Study on the Influence of Oxidation on Stacking Faults in 4H-SiC Epilayers
- Noninvasive Ventilation in Pulmonary Edema Complicating Acute Myocardial Infarction
- Growth Rate Enhancement of $(000\bar{1})$-Face Silicon–Carbide Oxidation in Thin Oxide Regime
- Measurement of Heart-Type Fatty Acid-Binding Protein Before Discharge
- Noninvasive Ventilation in Patients With Acute Cardiogenic Pulmonary Edema With Acute Coronary Syndrome: Is the Debate Still?:– Reply –
- A case of streptococcal toxic shock syndrome due to Group G streptococci identified as Streptococcus dysgalactiae subsp. equisimilis
- Measurement of Heart-Type Fatty Acid-Binding Protein Before Discharge