Concept and Demonstration of Individual Probe Actuation in Two-Dimensional Parallel Atomic Force Microscope System
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概要
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A concept of an array actuator that is used to control the tip–sample separation of cantilevers in a two-dimensional (2D) probe array scanning system is proposed in this article. The feasibility of the concept is demonstrated with a $10\times 10$ array actuator with 500 μm $xy$-pitches. The array actuator is made by slicing a bulk piezoceramic block. The obtained maximum actuation of a single probe was 2.19 μmp–p at $\pm 168$ Vp–p. A major issue for the actuator was the insufficient strength of the frame of the probe array chip. The demonstrated array actuator is highly compatible with previously developed parallel readout modules that use either a parallel optical beam or integrated piezoresistive deflection sensing. A large-scale 2D probe array is our ultimate target.
- 2007-09-30
著者
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Herzig Hans
Optics & Photonics Technology Laboratory, Ecole Polytechnique Fédérale de Lausanne (EPFL), Breguet 2, 2000 Neuchâtel, Switzerland
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Staufer Urs
SAMLAB, Institute of Microtechnology, University of Neuchâtel, Jaquet-Droz 1, 2002 Neuchâtel, Switzerland
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Polesel-Maris Jérôme
Swiss Center for Electronics and Microtechnology CSEM SA, Jaquet-Droz 1, 2002 Neuchâtel, Switzerland
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Akiyama Terunobu
SAMLAB, Institute of Microtechnology, University of Neuchâtel, Jaquet-Droz 1, 2002 Neuchâtel, Switzerland
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Aeschimann Laure
SAMLAB, Institute of Microtechnology, University of Neuchâtel, Jaquet-Droz 1, 2002 Neuchâtel, Switzerland
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Chantada Laura
University of Santiago de Compostela, Santiago de Compostela, Spain
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de Rooij
SAMLAB, Institute of Microtechnology, University of Neuchâtel, Jaquet-Droz 1, 2002 Neuchâtel, Switzerland
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Heinzelmann Harry
Swiss Center for Electronics and Microtechnology CSEM SA, Jaquet-Droz 1, 2002 Neuchâtel, Switzerland
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Manzardo Omar
OPTICS, Institute of Microtechnology, University of Neuchâtel, A.-L. Breguet 2, 2000 Neuchâtel, Switzerland
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Meister André
Swiss Center for Electronics and Microtechnology CSEM SA, Jaquet-Droz 1, 2002 Neuchâtel, Switzerland
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Polesel-Maris Jérôme
Swiss Center for Electronics and Microtechnology CSEM SA, Jaquet-Droz 1, 2002 Neuchâtel, Switzerland
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Pugin Raphaël
Swiss Center for Electronics and Microtechnology CSEM SA, Jaquet-Droz 1, 2002 Neuchâtel, Switzerland
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Vettiger Peter
SAMLAB, Institute of Microtechnology, University of Neuchâtel, Jaquet-Droz 1, 2002 Neuchâtel, Switzerland
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de Rooij
SAMLAB, Institute of Microtechnology, University of Neuchâtel, Jaquet-Droz 1, 2002 Neuchâtel, Switzerland
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Manzardo Omar
OPTICS, Institute of Microtechnology, University of Neuchâtel, A.-L. Breguet 2, 2000 Neuchâtel, Switzerland
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Vettiger Peter
SAMLAB, Institute of Microtechnology, University of Neuchâtel, Jaquet-Droz 1, 2002 Neuchâtel, Switzerland
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Aeschimann Laure
SAMLAB, Institute of Microtechnology, University of Neuchâtel, Jaquet-Droz 1, 2002 Neuchâtel, Switzerland
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Akiyama Terunobu
SAMLAB, Institute of Microtechnology, University of Neuchâtel, Jaquet-Droz 1, 2002 Neuchâtel, Switzerland
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Heinzelmann Harry
Swiss Center for Electronics and Microtechnology CSEM SA, Jaquet-Droz 1, 2002 Neuchâtel, Switzerland
関連論文
- Amplitude and Phase Measurements of Highly Focused Light in Optical Data Storage Systems
- Concept and Demonstration of Individual Probe Actuation in Two-Dimensional Parallel Atomic Force Microscope System